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MEMS and Microsystems:design, manufacture,and nanoscale engineering

Tai , Ran - Hsu

MEMS and Microsystems:design, manufacture,and nanoscale engineering - 2nd - 2008 - xxv,550

ISBN: 978-0-470-08301-7

Subjects--Personal Names:
Electronic Engineering

Subjects--Topical Terms:
Technology

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MEMS and Microsystems:design, manufacture,and nanoscale engineering