Tai , Ran  - Hsu  <br/><br/>
MEMS and Microsystems:design, manufacture,and nanoscale engineering 

 - 2nd 
 -  2008 
 - xxv,550 
<br/><br/><label>ISBN: </label>978-0-470-08301-7 
<br/><br/><label>Subjects--Personal Names: </label><br/>Electronic Engineering
<br/><br/><label>Subjects--Topical Terms: </label><br/>Technology