Tai- Ram Hsll <br/><br/>
MEMS and  Microsystems  Design and manufacture 

 - NA 
 -  2002 
 - xii,436 
<br/><br/><label>ISBN: </label>0-07-048709-X 
<br/><br/><label>Subjects--Personal Names: </label><br/>Electronic Engineering
<br/><br/><label>Subjects--Topical Terms: </label><br/>Technology